Publication:
Transient sputter yields of silicon with and without oxygen flooding
Date
| dc.contributor.author | Deleu, Jeroen | |
| dc.contributor.author | Brijs, Bert | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-09-30T11:48:33Z | |
| dc.date.available | 2021-09-30T11:48:33Z | |
| dc.date.issued | 1998 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2530 | |
| dc.source.conference | 11th Annual SIMS Workshop; 10-13 May 1998; Austin, TX, USA. | |
| dc.source.conferencelocation | ||
| dc.title | Transient sputter yields of silicon with and without oxygen flooding | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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