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Application of electron channeling contrast imaging to 3D semiconductor structures through proper detector configurations
Publication:
Application of electron channeling contrast imaging to 3D semiconductor structures through proper detector configurations
Date
2020
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Han, Han
;
Hantschel, Thomas
;
Strakos, Libor
;
Vystavel, Tomas
;
Baryshnikova, Marina
;
Mols, Yves
;
Kunert, Bernardette
;
Langer, Robert
;
Vandervorst, Wilfried
;
Caymax, Matty
Journal
Ultramicroscopy
Abstract
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1965
since deposited on 2021-10-28
Acq. date: 2025-10-26
Citations
Metrics
Views
1965
since deposited on 2021-10-28
Acq. date: 2025-10-26
Citations