Publication:
Mean free path of electrons in EUV photoresist in the energy range 20 to 450 eV
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Acq. date: 2026-03-16
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236 since deposited on 2024-04-15
27last month
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Acq. date: 2026-03-16
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879 since deposited on 2024-04-15
Acq. date: 2026-03-16
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