Publication:
Mean free path of electrons in EUV photoresist in the energy range 20 to 450 eV
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Acq. date: 2025-12-16
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142 since deposited on 2024-04-15
33last month
6last week
Acq. date: 2025-12-16
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875 since deposited on 2024-04-15
Acq. date: 2025-12-16
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