Publication:

Compact thermally stable high voltage FinFET with 40 nm tox and lateral break-down >35 V for 3D NAND flash periphery application

Date

2024
Journal article
https://doi.org/10.35848/1347-4065/ad2138
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dc.contributor.authorSpessot, Alessio
dc.contributor.authorMatagne, Philippe
dc.contributor.authorArimura, Hiroaki
dc.contributor.authorGanguly, Jishnu
dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorBastos, Joao
dc.contributor.authorSarkar, Ritam
dc.contributor.authorCapogreco, Elena
dc.contributor.authorChen, Y.
dc.contributor.authorHoriguchi, Naoto
dc.contributor.imecauthorSpessot, Alessio
dc.contributor.imecauthorMatagne, Philippe
dc.contributor.imecauthorArimura, Hiroaki
dc.contributor.imecauthorGanguly, Jishnu
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorBastos, Joao
dc.contributor.imecauthorSarkar, Ritam
dc.contributor.imecauthorCapogreco, Elena
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecSpessot, Alessio::0000-0003-2381-0121
dc.contributor.orcidimecMatagne, Philippe::0000-0003-0365-2066
dc.contributor.orcidimecArimura, Hiroaki::0000-0002-3138-708X
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecBastos, Joao::0000-0002-8877-9850
dc.contributor.orcidimecSarkar, Ritam::0000-0001-7753-4658
dc.contributor.orcidimecCapogreco, Elena::0000-0003-3610-3629
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.date.accessioned2025-07-24T13:00:58Z
dc.date.available2024-02-20T17:23:39Z
dc.date.available2025-07-24T13:00:58Z
dc.date.issued2024
dc.identifier.doi10.35848/1347-4065/ad2138
dc.identifier.issn0021-4922
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/43568
dc.publisherIOP Publishing Ltd
dc.source.beginpageArt. 03SP12
dc.source.endpageN/A
dc.source.issue3
dc.source.journalJAPANESE JOURNAL OF APPLIED PHYSICS
dc.source.numberofpages7
dc.source.volume63
dc.title

Compact thermally stable high voltage FinFET with 40 nm tox and lateral break-down >35 V for 3D NAND flash periphery application

dc.typeJournal article
dspace.entity.typePublication
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