Publication:

Evaluating Forksheet FET Reliability Concerns by Experimental Comparison with Co-integrated Nanosheets

Date

2022
Proceedings Paper
https://doi.org/10.1109/IRPS48227.2022.9764526
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dc.contributor.authorBury, Erik
dc.contributor.authorVaisman Chasin, Adrian
dc.contributor.authorKaczer, Ben
dc.contributor.authorVandemaele, M.
dc.contributor.authorTyaginov, S.
dc.contributor.authorFranco, Jacopo
dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorMertens, Hans
dc.contributor.authorWeckx, Pieter
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorLinten, Dimitri
dc.contributor.imecauthorBury, Erik
dc.contributor.imecauthorVaisman Chasin, Adrian
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorFranco, Jacopo
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorMertens, Hans
dc.contributor.imecauthorWeckx, Pieter
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorLinten, Dimitri
dc.contributor.orcidimecBury, Erik::0000-0002-5847-3949
dc.contributor.orcidimecVaisman Chasin, Adrian::0000-0002-9940-0260
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecFranco, Jacopo::0000-0002-7382-8605
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecLinten, Dimitri::0000-0001-8434-1838
dc.date.accessioned2023-06-01T12:40:19Z
dc.date.available2023-02-27T03:28:35Z
dc.date.available2023-06-01T12:40:19Z
dc.date.issued2022
dc.identifier.doi10.1109/IRPS48227.2022.9764526
dc.identifier.eisbn978-1-6654-7950-9
dc.identifier.issn1541-7026
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41179
dc.publisherIEEE
dc.source.conferenceIEEE International Reliability Physics Symposium (IRPS)
dc.source.conferencedateMAR 27-31, 2022
dc.source.conferencelocationDallas
dc.source.journalna
dc.source.numberofpages7
dc.title

Evaluating Forksheet FET Reliability Concerns by Experimental Comparison with Co-integrated Nanosheets

dc.typeProceedings paper
dspace.entity.typePublication
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