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Influence of the substrate doping level on spreading resistance profiling
Publication:
Influence of the substrate doping level on spreading resistance profiling
Date
1996
Journal article
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1576.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vandervorst, Wilfried
;
Clarysse, Trudo
;
Smith, H. E.
Journal
Journal of Vacuum Science and Technology B
Abstract
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1861
since deposited on 2021-09-29
Acq. date: 2025-10-26
Citations
Metrics
Views
1861
since deposited on 2021-09-29
Acq. date: 2025-10-26
Citations