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Investigating the Efficacy of Hafnium Dioxide Barrier Layers to Halt Copper Oxide Formation in Redistribution Layers for Three-Dimensional (3D) Packaging
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Investigating the Efficacy of Hafnium Dioxide Barrier Layers to Halt Copper Oxide Formation in Redistribution Layers for Three-Dimensional (3D) Packaging
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Date
2022
Journal article
https://doi.org/10.1021/acs.jpclett.2c02080
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Brady-Boyd, Anita
;
Chery, Emmanuel
;
Armini, Silvia
Journal
JOURNAL OF PHYSICAL CHEMISTRY LETTERS
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284
since deposited on 2022-09-08
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Acq. date: 2025-12-15
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1531
since deposited on 2022-09-08
Acq. date: 2025-12-15
Citations
Metrics
Downloads
284
since deposited on 2022-09-08
14
last month
Acq. date: 2025-12-15
Views
1531
since deposited on 2022-09-08
Acq. date: 2025-12-15
Citations