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Two-dimensional carrier mapping at the nanometer-scale on 32nm node targeted p-MOSFETs using high vacuum scanning spreading resistance microscopy
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Two-dimensional carrier mapping at the nanometer-scale on 32nm node targeted p-MOSFETs using high vacuum scanning spreading resistance microscopy
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Date
2011
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Eyben, Pierre
;
Clarysse, Trudo
;
Mody, Jay
;
Nazir, Aftab
;
Schulze, Andreas
;
Hantschel, Thomas
;
Vandervorst, Wilfried
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1947
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Acq. date: 2025-12-15
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Views
1947
since deposited on 2021-10-19
3
last month
1
last week
Acq. date: 2025-12-15
Citations