Publication:

Improved cost-effectiveness of the block co-polymer anneal process for DSA

Date

2016

Proceedings Paper

Simple item page Full metadata Statistics

Files

33037.pdf 507.75 KB

Author(s)

Pathangi Sriraman, Hari

;

Stokhof, Maarten

;

Knaepen, Werner

;

;

Mallik, Arindam

;

;

Vandenbroeck, Nadia

;

;

Metrics

1974 since deposited on 2021-10-23

Acq. date: 2026-01-10