Publication:

Improved cost-effectiveness of the block co-polymer anneal process for DSA

Date

2016
Proceedings Paper
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dc.contributor.authorPathangi Sriraman, Hari
dc.contributor.authorStokhof, Maarten
dc.contributor.authorKnaepen, Werner
dc.contributor.authorVaid, Varun
dc.contributor.authorMallik, Arindam
dc.contributor.authorChan, BT
dc.contributor.authorVandenbroeck, Nadia
dc.contributor.authorMaes, Jan
dc.contributor.authorGronheid, Roel
dc.contributor.imecauthorStokhof, Maarten
dc.contributor.imecauthorKnaepen, Werner
dc.contributor.imecauthorMallik, Arindam
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorVandenbroeck, Nadia
dc.contributor.imecauthorMaes, Jan
dc.contributor.imecauthorGronheid, Roel
dc.contributor.orcidimecMallik, Arindam::0000-0002-0742-9366
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.date.accessioned2021-10-23T13:35:13Z
dc.date.available2021-10-23T13:35:13Z
dc.date.embargo9999-12-31
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27125
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2512367
dc.source.beginpage97771Z
dc.source.conferenceAlternative Lithographic Technologies VIII
dc.source.conferencedate20/02/2016
dc.source.conferencelocationSan Jose, CA USA
dc.title

Improved cost-effectiveness of the block co-polymer anneal process for DSA

dc.typeProceedings paper
dspace.entity.typePublication
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