Publication:
Pattern roughness mitigation of 22 nm lines and spaces: The impact of H2 plasma treatment
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1953 since deposited on 2021-10-22
2last month
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Acq. date: 2025-12-11
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Views
1953 since deposited on 2021-10-22
2last month
1last week
Acq. date: 2025-12-11
Citations