Publication:

Self focusing SIMS: a new metrology for the analysis of confined volumes

Date

2017
Meeting abstract
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36531.pdf 254.7 KB

Author(s)

Franquet, Alexis  
;
Douhard, Bastien  
;
Morris, Richard  
;
Spampinato, Valentina  
;
Conard, Thierry  
;
Vandervorst, Wilfried  

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