Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Self focusing SIMS: a new metrology for the analysis of confined volumes
Publication:
Self focusing SIMS: a new metrology for the analysis of confined volumes
Copy permalink
Date
2017
Meeting abstract
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
36531.pdf
254.7 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Franquet, Alexis
;
Douhard, Bastien
;
Morris, Richard
;
Spampinato, Valentina
;
Conard, Thierry
;
Vandervorst, Wilfried
Journal
Abstract
Description
Metrics
Views
1789
since deposited on 2021-10-24
Acq. date: 2025-12-16
Citations
Metrics
Views
1789
since deposited on 2021-10-24
Acq. date: 2025-12-16
Citations