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Self focusing SIMS: a new metrology for the analysis of confined volumes

Date

2017
Meeting abstract
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dc.contributor.authorFranquet, Alexis
dc.contributor.authorDouhard, Bastien
dc.contributor.authorMorris, Richard
dc.contributor.authorSpampinato, Valentina
dc.contributor.authorConard, Thierry
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorMorris, Richard
dc.contributor.imecauthorSpampinato, Valentina
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecMorris, Richard::0000-0002-0902-7088
dc.contributor.orcidimecSpampinato, Valentina::0000-0003-3225-6740
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.date.accessioned2021-10-24T04:50:14Z
dc.date.available2021-10-24T04:50:14Z
dc.date.embargo9999-12-31
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28354
dc.identifier.urlhttp://sims.confer.uj.edu.pl/resources/Book_of_Abstracts_A4_v1.pdf
dc.source.beginpage228
dc.source.conference21st International Conference on Secondary Ion Mass Spectroscopy - SIMS
dc.source.conferencedate10/09/2017
dc.source.conferencelocationKrakow Poland
dc.title

Self focusing SIMS: a new metrology for the analysis of confined volumes

dc.typeMeeting abstract
dspace.entity.typePublication
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