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Overcoated diamond tips for nanometer-scale semiconductor device characterization
Publication:
Overcoated diamond tips for nanometer-scale semiconductor device characterization
Date
2015
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hantschel, Thomas
;
Tsigkourakos, Menelaos
;
Kluge, Julia
;
Werner, Thilo
;
Zha, Lichen
;
Paredis, Kristof
;
Eyben, Pierre
;
Nuytten, Thomas
;
Xu, Blair
;
Vandervorst, Wilfried
Journal
Microelectronic Engineering
Abstract
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1980
since deposited on 2021-10-22
Acq. date: 2025-10-23
Citations
Metrics
Views
1980
since deposited on 2021-10-22
Acq. date: 2025-10-23
Citations