Publication:

Overcoated diamond tips for nanometer-scale semiconductor device characterization

Date

2015
Journal article
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dc.contributor.authorHantschel, Thomas
dc.contributor.authorTsigkourakos, Menelaos
dc.contributor.authorKluge, Julia
dc.contributor.authorWerner, Thilo
dc.contributor.authorZha, Lichen
dc.contributor.authorParedis, Kristof
dc.contributor.authorEyben, Pierre
dc.contributor.authorNuytten, Thomas
dc.contributor.authorXu, Blair
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorZha, Lichen
dc.contributor.imecauthorParedis, Kristof
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorNuytten, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecParedis, Kristof::0000-0002-5163-4164
dc.contributor.orcidimecNuytten, Thomas::0000-0002-5921-6928
dc.date.accessioned2021-10-22T19:36:37Z
dc.date.available2021-10-22T19:36:37Z
dc.date.issued2015
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25361
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0167931714005206
dc.source.beginpage1
dc.source.endpage5
dc.source.journalMicroelectronic Engineering
dc.source.volume141
dc.title

Overcoated diamond tips for nanometer-scale semiconductor device characterization

dc.typeJournal article
dspace.entity.typePublication
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