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Substrate induced composition change during Ge2/Sb2/Te5 atomic layer deposition and study of initial reactions on SiO2 surface
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Substrate induced composition change during Ge2/Sb2/Te5 atomic layer deposition and study of initial reactions on SiO2 surface
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Date
2024
Journal article
https://doi.org/10.1116/6.0003890
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Sinha, Jyoti
;
Nyns, Laura
;
Delabie, Annelies
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
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328
since deposited on 2024-11-24
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Acq. date: 2026-01-10
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Metrics
Views
328
since deposited on 2024-11-24
6
last month
2
last week
Acq. date: 2026-01-10
Citations