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Substrate induced composition change during Ge2/Sb2/Te5 atomic layer deposition and study of initial reactions on SiO2 surface

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328 since deposited on 2024-11-24
6last month
2last week
Acq. date: 2026-01-10

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328 since deposited on 2024-11-24
6last month
2last week
Acq. date: 2026-01-10

Citations