Publication:

Automated Probe-Mark Analysis for Advanced Probe Technology Characterization

Date

2021
Journal article
https://doi.org/10.1109/MDAT.2020.3034043
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dc.contributor.authorJian, Yu-Rong
dc.contributor.authorFodor, Ferenc
dc.contributor.authorWu, Cheng-Wen
dc.contributor.authorMarinissen, Erik Jan
dc.contributor.imecauthorFodor, Ferenc
dc.contributor.imecauthorMarinissen, Erik Jan
dc.contributor.orcidimecMarinissen, Erik Jan::0000-0002-5058-8303
dc.date.accessioned2022-03-07T09:07:35Z
dc.date.available2022-03-07T09:07:35Z
dc.date.embargo9999-12-31
dc.date.issued2021
dc.identifier.doi10.1109/MDAT.2020.3034043
dc.identifier.issn2168-2356
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39317
dc.publisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
dc.source.beginpage82
dc.source.endpage89
dc.source.issue5
dc.source.journalIEEE DESIGN & TEST
dc.source.numberofpages8
dc.source.volume38
dc.title

Automated Probe-Mark Analysis for Advanced Probe Technology Characterization

dc.typeJournal article
dspace.entity.typePublication
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