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The unexpected effects of crystallization on Ta2O5 as studied by HRTEM and C-AFM
Publication:
The unexpected effects of crystallization on Ta2O5 as studied by HRTEM and C-AFM
Date
2013-04
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Celano, Umberto
;
Chintala, Ravi Chandra
;
Adelmann, Christoph
;
Richard, Olivier
;
Vandervorst, Wilfried
Journal
Microelectronic Engineering
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1880
since deposited on 2021-10-21
Acq. date: 2025-10-25
Citations
Metrics
Views
1880
since deposited on 2021-10-21
Acq. date: 2025-10-25
Citations