The unexpected effects of crystallization on Ta2O5 as studied by HRTEM and C-AFM

dc.contributor.author	Celano, Umberto
dc.contributor.author	Chintala, Ravi Chandra
dc.contributor.author	Adelmann, Christoph
dc.contributor.author	Richard, Olivier
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.imecauthor	Celano, Umberto
dc.contributor.imecauthor	Adelmann, Christoph
dc.contributor.imecauthor	Richard, Olivier
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.contributor.orcidimec	Celano, Umberto::0000-0002-2856-3847
dc.contributor.orcidimec	Adelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimec	Richard, Olivier::0000-0002-3994-8021
dc.date.accessioned	2021-10-21T06:53:45Z
dc.date.available	2021-10-21T06:53:45Z
dc.date.issued	2013-04
dc.identifier.issn	0167-9317
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/22111
dc.identifier.url	http://www.sciencedirect.com/science/article/pii/S0167931713003766
dc.source.beginpage	318
dc.source.endpage	321
dc.source.journal	Microelectronic Engineering
dc.source.volume	109
dc.title	The unexpected effects of crystallization on Ta2O5 as studied by HRTEM and C-AFM
dc.type	Journal article
dspace.entity.type	Publication
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