Publication:

Enhancement of DOF through RET and mask manufacturability in high-NA EUV

Date

2025

Proceedings Paper

https://doi.org/10.1117/12.3055034

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Author(s)

;

Gillijns, Werner

;

De Gendt, Stefan

;

Kim, Ryan Ryoung Han

Journal

Proceedings of SPIE

Statistics

43 since deposited on 2025-07-31

Acq. date: 2026-05-16