Publication:
Enhancement of DOF through RET and mask manufacturability in high-NA EUV
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | 0009-0009-9504-1852 | |
| cris.virtual.orcid | 0000-0003-3775-3578 | |
| cris.virtual.orcid | 0000-0002-2430-7360 | |
| cris.virtual.orcid | 0009-0002-3327-5169 | |
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| cris.virtualsource.orcid | 71fc66b5-5209-46b6-b4b5-9c55681cdc1d | |
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| cris.virtualsource.orcid | 3133fd1f-edd3-4f57-83bd-255a85992bcd | |
| dc.contributor.author | Hwang, Soobin | |
| dc.contributor.author | Gillijns, Werner | |
| dc.contributor.author | De Gendt, Stefan | |
| dc.contributor.author | Kim, Ryan Ryoung Han | |
| dc.contributor.imecauthor | Hwang, Soobin | |
| dc.contributor.imecauthor | Gillijns, Werner | |
| dc.contributor.imecauthor | De Gendt, Stefan | |
| dc.contributor.imecauthor | Kim, Ryoung-Han | |
| dc.contributor.orcidimec | Hwang, Soobin::0009-0009-9504-1852 | |
| dc.contributor.orcidimec | Gillijns, Werner::0000-0002-2430-7360 | |
| dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
| dc.date.accessioned | 2025-07-31T04:00:02Z | |
| dc.date.available | 2025-07-31T04:00:02Z | |
| dc.date.issued | 2025 | |
| dc.identifier.doi | 10.1117/12.3055034 | |
| dc.identifier.eisbn | 978-1-5106-8637-3 | |
| dc.identifier.isbn | 978-1-5106-8636-6 | |
| dc.identifier.issn | 0277-786X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/45985 | |
| dc.publisher | SPIE-INT SOC OPTICAL ENGINEERING | |
| dc.source.conference | 2025 Conference on DTCO and Computational Patterning | |
| dc.source.conferencedate | FEB 25-28, 2025 | |
| dc.source.conferencelocation | San Jose | |
| dc.source.numberofpages | 9 | |
| dc.title | Enhancement of DOF through RET and mask manufacturability in high-NA EUV | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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