Publication:

Integration of high-K gate dielectrics - wet etch, cleaning and surface conditioning

Date

2004
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorBeckx, Stephan
dc.contributor.authorCaymax, Matty
dc.contributor.authorClaes, Martine
dc.contributor.authorConard, Thierry
dc.contributor.authorDelabie, Annelies
dc.contributor.authorDeweerd, Wim
dc.contributor.authorHellin, David
dc.contributor.authorKraus, Harald
dc.contributor.authorOnsia, Bart
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorPuurunen, Riikka
dc.contributor.authorRohr, Erika
dc.contributor.authorSnow, Jim
dc.contributor.authorTsai, Wilman
dc.contributor.authorVan Doorne, Patrick
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorVertommen, Johan
dc.contributor.authorWitters, Thomas
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorBeckx, Stephan
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorClaes, Martine
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorHellin, David
dc.contributor.imecauthorOnsia, Bart
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorWitters, Thomas
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned2021-10-15T13:01:39Z
dc.date.available2021-10-15T13:01:39Z
dc.date.embargo9999-12-31
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8759
dc.source.beginpage67
dc.source.conferenceCleaning Technology in Semiconducting Device Manufacturing VIII. Proceedings of the International Symposium
dc.source.conferencedate13/10/2003
dc.source.conferencelocationOrlando, FL USA
dc.source.endpage77
dc.title

Integration of high-K gate dielectrics - wet etch, cleaning and surface conditioning

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
10406.pdf
Size:
597.87 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions