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Nano-scale feature analysis: Achieving high effective lateral resolution with micro-scale material characterization techniques: application to back-end processing
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1889 since deposited on 2021-10-22
2last month
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Acq. date: 2026-05-17
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Statistics
Views
1889 since deposited on 2021-10-22
2last month
1last week
Acq. date: 2026-05-17
Citations