Nano-scale feature analysis: Achieving high effective lateral resolution with micro-scale material characterization techniques: application to back-end processing

dc.contributor.author	Conard, Thierry
dc.contributor.author	Franquet, Alexis
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.imecauthor	Conard, Thierry
dc.contributor.imecauthor	Franquet, Alexis
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.contributor.orcidimec	Conard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimec	Franquet, Alexis::0000-0002-7371-8852
dc.date.accessioned	2021-10-22T18:44:20Z
dc.date.available	2021-10-22T18:44:20Z
dc.date.issued	2015
dc.identifier.issn	1862-6300
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/25097
dc.identifier.url	http://onlinelibrary.wiley.com/doi/10.1002/pssa.201400111/abstract
dc.source.beginpage	506
dc.source.endpage	511
dc.source.issue	3
dc.source.journal	Physica Status Solidi A
dc.source.volume	212
dc.title	Nano-scale feature analysis: Achieving high effective lateral resolution with micro-scale material characterization techniques: application to back-end processing
dc.type	Journal article
dspace.entity.type	Publication
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