Publication:

Directional Etching of Barrierless NiAl Lines on 300-mm Wafers for Interconnects Applications

Date

2024

Journal article

https://doi.org/10.1109/LED.2024.3449219

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Author(s)

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Soulie, Jean-Philippe

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Ulu Okudur, Fulya

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Souriau, Laurent

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Lazzarino, Frederic

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Journal

IEEE ELECTRON DEVICE LETTERS

Statistics

86 since deposited on 2024-11-30

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Acq. date: 2026-04-30