Publication:
Directional Etching of Barrierless NiAl Lines on 300-mm Wafers for Interconnects Applications
| dc.contributor.author | Kundu, Souvik | |
| dc.contributor.author | Soulie, Jean-Philippe | |
| dc.contributor.author | Marti, Giulio | |
| dc.contributor.author | Ulu Okudur, Fulya | |
| dc.contributor.author | Kundu, Shreya | |
| dc.contributor.author | Souriau, Laurent | |
| dc.contributor.author | Lazzarino, Frederic | |
| dc.contributor.author | Murdoch, Gayle | |
| dc.contributor.author | Park, Seongho | |
| dc.contributor.author | Tokei, Zsolt | |
| dc.contributor.imecauthor | Kundu, Souvik | |
| dc.contributor.imecauthor | Kundu, Shreya | |
| dc.contributor.imecauthor | Soulie, Jean-Philippe | |
| dc.contributor.imecauthor | Marti, Giulio | |
| dc.contributor.imecauthor | Ulu Okudur, Fulya | |
| dc.contributor.imecauthor | Souriau, Laurent | |
| dc.contributor.imecauthor | Lazzarino, Frederic | |
| dc.contributor.imecauthor | Murdoch, Gayle | |
| dc.contributor.imecauthor | Park, Seongho | |
| dc.contributor.imecauthor | Tokei, Zsolt | |
| dc.contributor.orcidimec | Kundu, Souvik::0000-0001-5815-8765 | |
| dc.contributor.orcidimec | Kundu, Shreya::0000-0001-8052-7774 | |
| dc.contributor.orcidimec | Soulie, Jean-Philippe::0000-0002-5956-6485 | |
| dc.contributor.orcidimec | Ulu Okudur, Fulya::0000-0002-8046-7748 | |
| dc.contributor.orcidimec | Souriau, Laurent::0000-0002-5138-5938 | |
| dc.contributor.orcidimec | Lazzarino, Frederic::0000-0001-7961-9727 | |
| dc.contributor.orcidimec | Murdoch, Gayle::0000-0002-6833-220X | |
| dc.contributor.orcidimec | Park, Seongho::0000-0002-1058-9424 | |
| dc.contributor.orcidimec | Tokei, Zsolt::0000-0003-3545-3424 | |
| dc.date.accessioned | 2025-07-31T07:03:07Z | |
| dc.date.available | 2024-11-30T16:46:41Z | |
| dc.date.available | 2025-07-31T07:03:07Z | |
| dc.date.issued | 2024 | |
| dc.identifier.doi | 10.1109/LED.2024.3449219 | |
| dc.identifier.issn | 0741-3106 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/44876 | |
| dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | |
| dc.source.beginpage | 2033 | |
| dc.source.endpage | 2035 | |
| dc.source.issue | 10 | |
| dc.source.journal | IEEE ELECTRON DEVICE LETTERS | |
| dc.source.numberofpages | 3 | |
| dc.source.volume | 45 | |
| dc.title | Directional Etching of Barrierless NiAl Lines on 300-mm Wafers for Interconnects Applications | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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