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Investigation of advanced dicing technologies for ultra low-k and 3D integration
Publication:
Investigation of advanced dicing technologies for ultra low-k and 3D integration
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Date
2016
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Podpod, Arnita
;
Inoue, Fumihiro
;
De Wolf, Ingrid
;
Gonzalez, Mario
;
Rebibis, Kenneth June
;
Miller, Andy
;
Beyne, Eric
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1971
since deposited on 2021-10-23
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Acq. date: 2025-12-15
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Views
1971
since deposited on 2021-10-23
1
last month
1
last week
Acq. date: 2025-12-15
Citations