Publication:

Investigation of advanced dicing technologies for ultra low-k and 3D integration

Date

2016

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

;

Inoue, Fumihiro

;

De Wolf, Ingrid

;

Gonzalez, Mario

;

Rebibis, Kenneth June

;

;

Statistics

1988 since deposited on 2021-10-23

Acq. date: 2026-09-17