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Memory node and oxide-nitride-oxide gate stack patterning for a bi-layer poly-silicon channel
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Memory node and oxide-nitride-oxide gate stack patterning for a bi-layer poly-silicon channel
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Date
2011
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Paraschiv, Vasile
;
Vecchio, Emma
;
Milenin, Alexey
;
Kar, Gouri Sankar
;
Demand, Marc
;
Coenegrachts, Bart
;
Vertommen, Johan
;
Boullart, Werner
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1816
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Acq. date: 2025-12-17
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Metrics
Views
1816
since deposited on 2021-10-19
1
last month
Acq. date: 2025-12-17
Citations