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AFM-based tomography for probing the electrical properties in confined volumes at the nanometer scale

Date

2013
Meeting abstract
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dc.contributor.authorSchulze, Andreas
dc.contributor.authorHantschel, Thomas
dc.contributor.authorEyben, Pierre
dc.contributor.authorVerhulst, Anne
dc.contributor.authorRooyackers, Rita
dc.contributor.authorVandooren, Anne
dc.contributor.authorMody, Jay
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVerhulst, Anne
dc.contributor.imecauthorVandooren, Anne
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecVerhulst, Anne::0000-0002-3742-9017
dc.contributor.orcidimecVandooren, Anne::0000-0002-2412-0176
dc.date.accessioned2021-10-21T11:52:35Z
dc.date.available2021-10-21T11:52:35Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23059
dc.source.beginpageY6.01
dc.source.conferenceMRS Spring Meeting Symposium Y: Advances in Scanning Probe Microscopy for Imaging Functionality on the Nanoscale
dc.source.conferencedate1/04/2013
dc.source.conferencelocationSan Francisco, CA USA
dc.title

AFM-based tomography for probing the electrical properties in confined volumes at the nanometer scale

dc.typeMeeting abstract
dspace.entity.typePublication
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