Publication:
Extraction of the defect distributions in DRAM capacitor using I–V and C–V sensitivity maps
Date
| dc.contributor.author | Sereni, Gabriele | |
| dc.contributor.author | Larcher, Luca | |
| dc.contributor.author | Kaczer, Ben | |
| dc.contributor.author | Popovici, Mihaela Ioana | |
| dc.contributor.imecauthor | Kaczer, Ben | |
| dc.contributor.imecauthor | Popovici, Mihaela Ioana | |
| dc.contributor.orcidimec | Kaczer, Ben::0000-0002-1484-4007 | |
| dc.contributor.orcidimec | Popovici, Mihaela Ioana::0000-0002-9838-1088 | |
| dc.date.accessioned | 2021-10-23T14:46:10Z | |
| dc.date.available | 2021-10-23T14:46:10Z | |
| dc.date.issued | 2016 | |
| dc.identifier.issn | 0741-3106 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/27291 | |
| dc.identifier.url | https://ieeexplore.ieee.org/document/7544449 | |
| dc.source.beginpage | 1280 | |
| dc.source.endpage | 1283 | |
| dc.source.issue | 10 | |
| dc.source.journal | IEEE Electron Device Letters | |
| dc.source.volume | 37 | |
| dc.title | Extraction of the defect distributions in DRAM capacitor using I–V and C–V sensitivity maps | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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