Publication:

Back-end, low-k dielectric compatible resist rework procedure

Date

2002
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Author(s)

Reybrouck, Mario  
;
Vangoidsenhoven, Diziana  
;
Maenhoudt, Mireille
;
Van Aelst, Joke  
;
Boullart, Werner  

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2096 since deposited on 2021-10-14
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