Publication:

Back-end, low-k dielectric compatible resist rework procedure

Date

2002
Presentation
Simple item page Full metadata Statistics
 
dc.contributor.authorReybrouck, Mario
dc.contributor.authorVangoidsenhoven, Diziana
dc.contributor.authorMaenhoudt, Mireille
dc.contributor.authorVan Aelst, Joke
dc.contributor.authorBoullart, Werner
dc.contributor.imecauthorReybrouck, Mario
dc.contributor.imecauthorVangoidsenhoven, Diziana
dc.contributor.imecauthorVan Aelst, Joke
dc.contributor.imecauthorBoullart, Werner
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.date.accessioned2021-10-14T22:54:56Z
dc.date.available2021-10-14T22:54:56Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6755
dc.source.conference39th Interface Symposium
dc.source.conferencedate22/09/2002
dc.source.conferencelocationSan Diego, CA USA
dc.title

Back-end, low-k dielectric compatible resist rework procedure

dc.typeOral presentation
dspace.entity.typePublication
Files
Publication available in collections:
Presentations