Publication:

Integration of high-k gate dielectrics - wet etch, cleaning and surface conditioning

Date

2003

Meeting abstract

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Author(s)

De Gendt, Stefan

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Conard, Thierry

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Delabie, Annelies

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Paraschiv, Vasile

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Puurunen, Riikka

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Van Doorne, Patrick

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Van Elshocht, Sven

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Vertommen, Johan

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Witters, Thomas

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Metrics

1959 since deposited on 2021-10-15

Acq. date: 2026-01-11