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Investigation of low temperature epitaxial SiGe:P in view of source/drain application for 5nm technology node and below
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1993 since deposited on 2021-10-28
4last month
Acq. date: 2026-01-11
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Metrics
Views
1993 since deposited on 2021-10-28
4last month
Acq. date: 2026-01-11
Citations