Publication:
28nm pitch of line/space pattern transfer into silicon substrates with chemo-epitaxy directed self-assembly (DSA) process flow
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2133 since deposited on 2021-10-21
1last month
Acq. date: 2026-01-26
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Views
2133 since deposited on 2021-10-21
1last month
Acq. date: 2026-01-26
Citations