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28nm pitch of line/space pattern transfer into silicon substrates with chemo-epitaxy directed self-assembly (DSA) process flow

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2135 since deposited on 2021-10-21
2last month
Acq. date: 2026-02-24

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2135 since deposited on 2021-10-21
2last month
Acq. date: 2026-02-24

Citations