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Versatile MEMS and MEMS integration technology platforms for cost effective MEMS development
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Acq. date: 2026-08-05
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Acq. date: 2026-08-05
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1 since deposited on 2021-10-18
Acq. date: 2026-08-05
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1841 since deposited on 2021-10-18
2last month
1last week
Acq. date: 2026-08-05
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