Publication:
Non-linear dielectric constant increase with Ti composition in high-k ALD-HfTiOx films after O2 crystallization annealing
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1933 since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations
Metrics
Views
1933 since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations