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Non-linear dielectric constant increase with Ti composition in high-k ALD-HfTiOx films after O2 crystallization annealing
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1937 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-11
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Metrics
Views
1937 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-11
Citations