Publication:
Exploration of Alternative Mask for 0.33NA EUV Single Patterning at Pitch 28nm
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Acq. date: 2025-12-11
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116 since deposited on 2022-05-22
5last month
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Acq. date: 2025-12-11
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1679 since deposited on 2022-05-22
2last month
Acq. date: 2025-12-11
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