Publication:
Exploration of Alternative Mask for 0.33NA EUV Single Patterning at Pitch 28nm
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174 since deposited on 2022-05-22
28last month
8last week
Acq. date: 2026-08-06
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1690 since deposited on 2022-05-22
6last month
2last week
Acq. date: 2026-08-06
Citations