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Atom probe tomography on contemporary semiconductor devices: Challenges in data acquisition, quantification and spatial accuracy
Publication:
Atom probe tomography on contemporary semiconductor devices: Challenges in data acquisition, quantification and spatial accuracy
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Date
2019
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Scheerder, Jeroen
;
Fleischmann, Claudia
;
Dialameh, Masoud
;
Melkonyan, Davit
;
Morris, Richard
;
Vandervorst, Wilfried
;
van der Heide, Paul
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2056
since deposited on 2021-10-27
Acq. date: 2025-12-10
Citations
Metrics
Views
2056
since deposited on 2021-10-27
Acq. date: 2025-12-10
Citations