Publication:

Atom probe tomography on contemporary semiconductor devices: Challenges in data acquisition, quantification and spatial accuracy

Date

2019
Presentation
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dc.contributor.authorScheerder, Jeroen
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorDialameh, Masoud
dc.contributor.authorMelkonyan, Davit
dc.contributor.authorMorris, Richard
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorvan der Heide, Paul
dc.contributor.imecauthorScheerder, Jeroen
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorDialameh, Masoud
dc.contributor.imecauthorMorris, Richard
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorvan der Heide, Paul
dc.contributor.orcidimecScheerder, Jeroen::0000-0002-9301-0392
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecDialameh, Masoud::0000-0002-1439-590X
dc.contributor.orcidimecMorris, Richard::0000-0002-0902-7088
dc.contributor.orcidimecvan der Heide, Paul::0000-0001-6292-0329
dc.date.accessioned2021-10-27T17:41:22Z
dc.date.available2021-10-27T17:41:22Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33948
dc.source.conferenceEuropean Atom Probe Workshop 2019
dc.source.conferencedate12/11/2019
dc.source.conferencelocationRouen France
dc.title

Atom probe tomography on contemporary semiconductor devices: Challenges in data acquisition, quantification and spatial accuracy

dc.typeOral presentation
dspace.entity.typePublication
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