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Low temperature through-Si via fabrication using electroless deposition
Publication:
Low temperature through-Si via fabrication using electroless deposition
Date
2012
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Inoue, Fumihiro
;
Philipsen, Harold
;
Radisic, Alex
;
Armini, Silvia
;
Leunissen, Peter
;
Miyake, Hiroshi
;
Arima, Ryohei
;
Shimizu, Tomohiro
;
Ito, Toshiaki
;
Seki, Hirofumi
;
Shinozaki, Yuko
;
Yamamoto, Tomohiko
;
Shingubara, Shoso
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1896
since deposited on 2021-10-20
Acq. date: 2025-10-28
Citations
Metrics
Views
1896
since deposited on 2021-10-20
Acq. date: 2025-10-28
Citations