Publication:

Understanding improved TANOS retention by material analysis of the SixNy trapping layer

Date

2008

Proceedings Paper

Simple item page Full metadata Statistics

Files

16660.pdf 141.92 KB

Author(s)

Rothschild, Aude

;

Van den Bosch, Geert

;

Breuil, Laurent

;

Cacciato, Antonio

;

Dekkers, Harold

;

;

Conard, Thierry

;

;

Statistics

1904 since deposited on 2021-10-17

Acq. date: 2026-02-24