Publication:

Understanding improved TANOS retention by material analysis of the SixNy trapping layer

Date

2008
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorRothschild, Aude
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorBreuil, Laurent
dc.contributor.authorCacciato, Antonio
dc.contributor.authorDekkers, Harold
dc.contributor.authorSleeckx, Erik
dc.contributor.authorConard, Thierry
dc.contributor.authorBrijs, Bert
dc.contributor.authorKittl, Jorge
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorBreuil, Laurent
dc.contributor.imecauthorDekkers, Harold
dc.contributor.imecauthorSleeckx, Erik
dc.contributor.imecauthorConard, Thierry
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecBreuil, Laurent::0000-0003-2869-1651
dc.contributor.orcidimecDekkers, Harold::0000-0003-4778-5709
dc.contributor.orcidimecSleeckx, Erik::0000-0003-2560-6132
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.date.accessioned2021-10-17T10:17:12Z
dc.date.available2021-10-17T10:17:12Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14392
dc.source.beginpage2110
dc.source.conference214th ECS Meeting
dc.source.conferencedate12/10/2008
dc.source.conferencelocationHonolulu, HI USA
dc.title

Understanding improved TANOS retention by material analysis of the SixNy trapping layer

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
16660.pdf
Size:
141.92 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions