Publication:
Galvanic corrosion of PN junctions during the dielectric removal with HF for RMG transistors
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1937 since deposited on 2021-10-19
2last month
Acq. date: 2025-12-16
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Metrics
Views
1937 since deposited on 2021-10-19
2last month
Acq. date: 2025-12-16
Citations