Publication:

Influence of absorbed water components on SiOCH low-k reliability

Date

2008

Journal article

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Files

16592.pdf 676.08 KB

Author(s)

;

;

Carbonell, Laure

;

;

Van Aelst, Joke

;

Baklanov, Mikhaïl

;

Groeseneken, Guido

;

;

Journal

Journal of Applied Physics

Statistics

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Acq. date: 2026-08-26