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Gate patterning development for monolithic CFET integration
Publication:
Gate patterning development for monolithic CFET integration
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Date
2023-02-28
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Dupuy, Emmanuel
;
Tao, Zheng
;
Mertens, Hans
;
Demuynck, Steven
;
Hosseini, Maryam
;
Zhou, Daisy
;
Wang, Shouhua
;
Sebaai, Farid
;
Batuk, Dmitry
;
Horiguchi, Naoto
;
Chan, BT
;
Lazzarino, Frederic
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183
since deposited on 2023-01-09
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last month
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Acq. date: 2025-12-12
Citations
Metrics
Views
183
since deposited on 2023-01-09
14
last month
13
last week
Acq. date: 2025-12-12
Citations