Publication:

Gate patterning development for monolithic CFET integration

Date

2023-02-28
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Author(s)

Dupuy, Emmanuel  
;
Tao, Zheng  
;
Mertens, Hans  
;
Demuynck, Steven  
;
Hosseini, Maryam  
;
Zhou, Daisy  
;
Wang, Shouhua  
;
Sebaai, Farid  
;
Batuk, Dmitry  
;
Horiguchi, Naoto  
;
Chan, BT  
;
Lazzarino, Frederic  

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204 since deposited on 2023-01-09
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Acq. date: 2026-02-28

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