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Low temperature anneal of electron irradiation induced defects in p-type silicon
Publication:
Low temperature anneal of electron irradiation induced defects in p-type silicon
Date
1998
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Trauwaert, Marie-Astrid
;
Vanhellemont, Jan
;
Maes, Herman
;
Van Bavel, Mieke
;
Langouche, G.
;
Clauws, P.
Journal
Materials Science and Technology
Abstract
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2029
since deposited on 2021-10-01
Acq. date: 2025-10-23
Citations
Metrics
Views
2029
since deposited on 2021-10-01
Acq. date: 2025-10-23
Citations