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Fabrication of virtual Ge and Ge-rich SiGe substrates using selective or non-selective epitaxial growth

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1992 since deposited on 2021-10-18
3last month
Acq. date: 2026-03-16

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1992 since deposited on 2021-10-18
3last month
Acq. date: 2026-03-16

Citations