Publication:
First demonstration of 15nm-WFIN inversion-mode relaxed germanium bulk nFinFET with Si-cap free RMG and NiSiGe source/drain
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1932 since deposited on 2021-10-22
Acq. date: 2025-10-23
Citations
Metrics
Views
1932 since deposited on 2021-10-22
Acq. date: 2025-10-23
Citations