Publication:

First demonstration of 15nm-WFIN inversion-mode relaxed germanium bulk nFinFET with Si-cap free RMG and NiSiGe source/drain

Date

2014

Proceedings Paper

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Author(s)

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Witters, Liesbeth

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Arimura, Hiroaki

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Sasaki, Yuichiro

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Milenin, Alexey

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Hikavyy, Andriy

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;

Lagrain, Pieter

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;

;

Vrancken, Christa

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;

;

Horiguchi, Naoto

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;

Collaert, Nadine

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1934 since deposited on 2021-10-22

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Acq. date: 2026-02-26