Publication:
Fabrication and Electromechanical Characterization of Silicon Nanomechanical Membrane Flexure MEMS Sensor for Gas Sensing Applications
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423 since deposited on 2024-08-11
Acq. date: 2026-01-06
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Views
423 since deposited on 2024-08-11
Acq. date: 2026-01-06
Citations