Publication:
Fabrication and Electromechanical Characterization of Silicon Nanomechanical Membrane Flexure MEMS Sensor for Gas Sensing Applications
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436 since deposited on 2024-08-11
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Acq. date: 2026-08-30
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Statistics
Views
436 since deposited on 2024-08-11
6last month
4last week
Acq. date: 2026-08-30
Citations